Physics Colloquium - CHARGED PARTICLE INTERACTIONS AND SEMICONDUCTOR SCIENCE

 Dr. L.C. Feldman

Rutgers University, Piscataway, NJ

The interaction of energetic charged particles with materials is a physics problem that dates back to the earliest days of atomic science and quantum mechanics. Starting with simple “billiard ball collisions” and the Coulomb force, and many refinements, we have reached a deep understanding of this complex, many body process. Once understood the process has been applied in almost every area of physics-nuclear, plasma, fusion, materials, radiation science, particle physics, cancer therapy, etc. Arguably the biggest impact has been in semiconductor science and technology. Charged particle physics has been one of the enablers of the silicon revolution that started in ~1960 and continues to this day. This talk, presented at the upper-level undergraduate level, will present the basic physics underlying these interactions and illustrate the impact of particle solid interactions on semiconductor science using such processes as ion implantation, materials processing, materials analysis, interface structure determination. The talk will finish with illustrations of some of the newest use of charged particle interactions employing a Helium Ion Microscope with a sub-nanometer beam spot.

 Friday, April 14, 2017

2:45 PM – Allison Lab Rm. 200 – Refreshments

3:00 PM – Parker Hall Rm. 236 – Colloquium